Inductively-Coupled-Plasma

                                                       用途
                                                          ■ 半导体硅片PN结的去除
                                                          ■ PSS 的蚀刻
                                                          ■ LED 的蚀刻
                                                          ■ ITO 膜的蚀刻
                                                          ■ 硅晶片的蚀刻与表面有机物的清洗