Reactive-Ion-Etching-Plasma

                                                       用途
                                                          ■ 金属氧化物的清洁
                                                          ■ LED 的蚀刻
                                                          ■ ITO 膜的蚀刻
                                                          ■ 硅晶片的蚀刻与表面有机物的清洁